Gases Used in Semiconductor Manufacturing

Semiconductor Manufacturing

The semiconductor industry has become a leading sector globally. A small microchip represents a highly complex system that integrates various scientific and technological disciplines. Semiconductor products are widely applied in everyday life, particularly in electronics, telecommunications, mobile devices, and computers.

Semiconductors

Semiconductors have become indispensable materials for many electronic devices, playing a crucial role in controlling equipment across various fields such as air conditioning, laser surgery, healthcare, and more. Advances in semiconductor technology have optimized systems, miniaturized devices, and improved energy efficiency, contributing to global environmental protection and a prosperous future.

The presence of leading global semiconductor companies like Intel and Samsung investing in Vietnam has significantly driven the strong development of this industry in recent years.

The production of semiconductors and microchips requires numerous specialized gases such as Silane (SiH4), Diborane (B2H6), and Phosphine (PH3). These gases play a crucial role in almost every manufacturing step, from refining silicon dioxide (SiO2) into pure silicon, to creating wafers, processing them, and finally assembling and packaging the finished product.

The Role of Industrial Gases in Semiconductor Manufacturing

Industrial gases play a pivotal role in semiconductor manufacturing by facilitating the essential chemical reactions that create the electrical properties of semiconductors. The production of integrated circuits is highly complex, requiring more than 30 different gases across various stages. Due to this complexity, the gases used must be extremely pure and precisely controlled at every step to ensure the proper configuration of the semiconductor materials.

Some core industrial gases used in semiconductor manufacturing include nitrogen, oxygen, argon, and hydrogen:

  • Nitrogen: Acts as a purging or cleaning gas, removing oxygen and moisture during production. High-purity nitrogen clears contaminants from tools and wafers.
  • Helium: Serves as a protective gas with high thermal conductivity, efficiently regulating silicon wafer temperatures.
  • Hydrogen: Used for epitaxial deposition of materials like silicon and germanium and oxidized surface annealing; also acts as a cleaning agent in UV photochemical processes.
  • Argon: An inert, easily ionized gas used as primary plasma for deposition and etching, essential in UV lithography and cleaning delicate chips.

See the gases used in the semiconductor industry:

Gases Used in Semiconductor Manufacturing

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